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SG-O

CIS/ALS/Light-Sensor Wafer Tester

Provide All You Need in CIS/ALS/Light-Sensor Wafer Level Testing.

  SG-O is a CIS/ALS/Light-Sensor wafer tester which combines a Highly Uniform Light Source and a Semi-Automatic Wafer Prober. The Highly Uniform Light Source can provide a continuous white light spectrum from 400nm to 1700nm with the monochromatic light output with certain FWHM at many different wavelength. The Prober can handle max. 200mm wafer size and single die of size greater than 1cm x 1cm. SG-O integrates a ultra-low noise thermal chuck which can provide the temperature range from -60°C to 180 °C with rapid temperature ramping speed and stability. SG-O provides all you need in CIS/ALS/Light-Sensor design validation or process-yield checking.

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SG-O CIS wafer level tester wafer and probe

Features

Highly Uniform
Light Source

Programable
Automatic Prober

Wide Temperature and
Low Noise Chuck

Application

  • CIS/ALS/Light-Sensor Wafer Testing;
  • CIS/ALS/Light-Sensor Wafer Mapping and Yield Checking
  • ToF Sensor Testing
  • LiDAR Sensor Testing
  • InGaAs PD testing
  • SPAD sensor Testing
  • Light-Sensor Analog  Parameters Testing:
    1. Quantum Efficiency
    2. Spectral Response
    3. System Gain
    4. Sensitivity
    5. Dynamic Range
    6. Dark Current/ Noise
    7. SNR
    8. Saturation Capacity
    9. Linearity Error(LE)
    10. DCNU (Dark Current Non-Uniformity)
    11. PRNU (Photo Response Non-Uniformity)

System Design

SG-O CIS wafer level tester 02_System structure

The SG-O CIS/ALS/Light-Sensor tester (wafer level) system diagram. Th Highly Uniform Light Source is controlled by PC-1. The light output is guided by the fiber to the Optical Homogenizer to generate the uniform light beam. The microscope and the homogenizer are controlled by a automatic translation stage by PC-1 to switch the positions and the functions. The Prober system is MPI TS2000 and controlled by PC-2. The position of chuck stage is also controlled by PC-2. The thermal chuck temperature can be controlled from -55℃ to  180℃ , which covers the most IC testing temperature range. The light intensity is detected and calibrated by one Si photodetector and one InGaAs photodetector through a pico-amp current meter. 

Specification

SG-O provides complete specifications for all you need in CIS/ALS/Light-Sensor wafer testing. Below is the main components and their details. If you need more details please be free to contact us!

Highly Uniform Light Source

(a) Center-Wavelength with 10nm FWHM: 420nm, 450nm, 490nm, 510nm, 550nm, 570nm, 620nm, 670nm, 680nm, 710nm, 780nm, 870nm

(b) Center-wavelength with 25nm FWHM: 1010nm, 1250nm, 1450nm

(c) Center-wavelength with 45±5nm FWHM: 815nm

(d) Center-wavelength with 50nm FWHM: 1600nm

(e) Center-wavelength with 60±5nm FWHM: 650nm

(f) Center-wavelength with 70±5nm FWHM: 485nm, 555nm

(g) Center-wavelength with 100±5nm FWHM: 1600nm

*Out of Band Light Transmission ≤ 0.01%

*Peak Transmission in Band-Pass Region ≥ 80%

*Center-Wavelength Tolerance: (a) ≤ ±2nm; (b)~(g) ≤ ±5nm

*FWHM Tolerance: (a) ≤ ±2nm; (b)~(g) ≤ ±5nm

Semi-Automatic Wafer Prober
Spectral Irradiance Meter
More Specifications

  SG-O integrates Enlitech’s Advanced Light Simulator Technologies and MPI Automated Probe Systems. Enlitech provides many optical options to fit user’s requirements for CIS/ALS/Light-Sensor wafer testing, including  wavelength ranges, light intensity and uniform beam sizes. We have over decades of experience to help customers to solve the challenges of CIS/ALS/Light-Sensor wafer testing and design variation. Please be free to contact us for more details. Our professional team will assist you!

Key Performance

CIS/ALS/Light-Sensor wafer tester_software

The operating software of the SG-O system. For the Highly Uniform Light Source controlling software, SG-O provides light source system control and light intensity measurement. The Labview functional palettes, driver/DLL files for individual optical components are provided. The softwares control the translation stage to facilitate illuminate large are devices in parts. The integration links include sending/receiving commands like start dies stepping, dies alignment/probing are already integrated and provided.

SG-O CIS/ALS/Light-Sensor wafer level tester 22_ wafer and camera calibration

CIS/ALS/Light-Sensor wafer image from the microscope system of SG-O.

SG-O CIS/ALS/Light-Sensor wafer level tester 23_ wafer and probe card install
SG-O SG O CIS wafer level tester 23 wafer and probe card

Probe card installation image for CIS/ALS/Light-Sensor wafer.

SG-O CIS/ALS/Light-Sensor wafer level tester 23_ wafer and probe card tips image

Probe tips image for CIS/ALS/Light-Sensor wafer inspection.

The light homogenizer of SG-O CIS wafer level tester

The Light Homogenizer of SG-O CIS wafer level tester.

The light homogenizer optical simulation and performance .

Optical Simulation and Performance of the Light Homogenizer of SG-O CIS wafer level tester.

SG-O CIS wafer level tester light beam uniformity map

The light beam uniformity. The beam spot uniformity tested at 420nm with 42mm x 25mm. The non-uniformity is 1%.

SG-O SG O CIS wafer level tester 13 Uniform light map

The light beam uniformity. The beam spot size is 50mm x 50mm. The non-uniformity is 1.43%.

The monochromatic light intensities at different wavelengths of SG-O CIS wafer level tester from UV, VIS, to NIR and SWIR. The light intensity is measured by Si irradiance meter.

The monochromatic light intensities at different wavelengths, which is from UV, to NIR. The light intensity is measured by the Si irradiance meter. The light intensity range is capable for all kinds of CIS/ALS/Light-Sensor testing.

The monochromatic light intensities at different wavelengths from NIR to SWIR. The light intensity is measured by the InGaAs irradiance meter.

The monochromatic light intensities at different wavelengths from NIR to SWIR. The light intensity is measured by the InGaAs irradiance meter.

The Highly Uniform Light Source of SG-O has a ultra-stable light engine. The light intensity instability for short- or long-term are both better than 0.2% over whole wavelength range.

The light intensity instability of SG-O CIS/ALS/Light-Sensor wafer tester at 420nm.

The light intensity short term instability is tested at 420nm monochromatic light output. The light instability is monitored by the Si irradiance meter for 60mins. The instability is 0.12% for 1 hour.

The light intensity instability of SG-O CIS/ALS/Light-Sensor wafer tester at 1250nm.

The light intensity short term instability is tested at 1250nm monochromatic light output. The light instability is monitored by the SInGaAs irradiance meter for 60mins. The instability is 0.09% for 1 hour.

The light intensity short term instability is tested at 420nm monochromatic light output. The light instability is monitored by the Si irradiance meter for 10hrs. The instability is 0.1% for 10hrs.

The light intensity short term instability is tested at 420nm monochromatic light output. The light instability is monitored by the Si irradiance meter for 10hrs. The instability is 0.1% for 10hrs.

The light intensity short term instability is tested at 1250nm monochromatic light output. The light instability is monitored by the SInGaAs irradiance meter for 10hrs. The instability is 0.09% for 10hrs

The light intensity short term instability is tested at 1250nm monochromatic light output. The light instability is monitored by the SInGaAs irradiance meter for 10hrs. The instability is 0.06% for 10hrs.

SG-O SG O CIS wafer level tester 18 Variable attenuator has 3 decade resolution wit over 1000 steps

The light intensity attenuator of SG-O system. The light output intensity can be manipulated by PC at least 1000 steps resolution.

MPI Automatic Prober Fact Sheet for CIS/ALS/Light-Sensor wafer testing

The Fact Sheet of the Automated Prober. SG-O CIS/ALS/Light-Sensor wafer tester integrates MPI probers. More details can be found in MPI’s website. 

Source: MPI 

CIS wafer prober_wafer loader

Automated single wafer loader is build in the SG-O prober system. It is convenient for CIS/ALS/Light-Sensor wafer loading. Loading and unloading wafer is straight forward and intuitive for users. The temperature control panel is also integrated in the front of the loading chamber which is convenient for operations.

SG-O SG O CIS wafer level tester 10 MPI Prober front loader

SG-O CIS/ALS/Light-Sensor wafer tester also has a manual loading function, which can manually load the wafer from the front door. This front door has the safety managing function, which can automatically monitor the chuck temperature and prevents opening the door during testing to keep CIS/ALS/Light-Sensor wafer and user safe.

CIS wafer prober and tester_thermal chuck_cooling-and-heating-priciple

The thermal chuck of SG-O CIS/ALS/Light-Sensor wafer tester is temperature controlled by a ERS’s minimized CDA system, which much more efficient than before. The temperature range can cover -80°C to 180°C (depends on ERA’a models). Nitrogen purging is possible by using separate valve. The targeting temperature ramping rate and stability are excellent for CIS/ALS/Light-Sensor wafer testing in any extra-ordinate conditions, such as space.

SG-O SG O CIS wafer level tester 19 Thermal chuck operating range

The probe card dimension capability can be from 4.5 inch tup to 8 inch long. The working distance between DUT and last optical element of Highly Uniform Light Source of SG-O is over 200mm as shown in the picture.

The probe card dimension capability can be from 4.5 inch tup to 8 inch long. The working distance between DUT and last optical element of Highly Uniform Light Source of SG-O is over 200mm as shown in the picture.​

The probe card dimension capability can be from 4.5 inch tup to 8 inch long. The working distance between DUT and last optical element of Highly Uniform Light Source of SG-O is over 200mm as shown in the picture.

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